Optical Materials: Microstructuring Surfaces with Off-Electrode Plasma
Nikolay L. Kazanskiy, Vsevolod A. Kolpakov
ISBN: 9781138197282
Vydavateľstvo: Taylor & Francis
Rok vydania: 2017
Vydanie: 1
Väzba: Hardback
Počet strán: 229
Pôvodná cena: 247,00 €
Výstavná cena:
222,30 €(t.j. po zľave 10%)
(Cena je uvedená vrátane 10% DPH)
Katalógová cena: 190 GBP
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This reference book concentrates on microstructuring surfaces of optical materials with directed fluxes of off-electrode plasma generated by high-voltage gas discharge and developing methods and equipment related to this technique. It covers theoretical and experimental studies on the electrical and physical properties of high-voltage gas discharges used to generate plasma outside an electrode gap. A new class of methods and devices that makes it possible to implement a series of processes for fabricating diffraction microstructures on large format wafers is also discussed.